The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jun. 02, 2026
Filed:
Aug. 29, 2022
Applied Materials, Inc., Santa Clara, CA (US);
Youngki Chang, Santa Clara, CA (US);
Dhritiman Subha Kashyap, Murugeshpalya, IN;
Rakesh Ramadas, San Jose, CA (US);
Ashutosh Agarwal, San Jose, CA (US);
Shashidhara Patel H B, Bangalore, IN;
Muhannad Mustafa, Milpitas, CA (US);
Sanjeev Baluja, Campbell, CA (US);
Applied Materials, Inc., Santa Clara, CA (US);
Abstract
Gas distribution apparatuses described herein include a mixing plate adjacent a back plate of a showerhead. The mixing plate has a back surface and a front surface defining a thickness of the mixing plate. The mixing plate has a mixing channel comprising a top portion and a bottom portion defining a mixing channel length and at least two gas inlets in fluid communication with the top portion of the mixing channel. The gas distribution apparatus also includes a mixer disposed within the thickness of the mixing plate in the top portion of the mixing channel. The mixer has a top plate and a mixer stem extending from the top plate and a plurality of blades positioned along the mixer stem length. Also provided are processing chambers including the gas distribution apparatuses described herein.