The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
May. 26, 2026
Filed:
May. 21, 2021
Applicants:
Kokusai Electric Corporation, Tokyo, JP;
National Institute of Advanced Industrial Science and Technology, Tokyo, JP;
Inventors:
Assignees:
KOKUSAI ELECTRIC CORPORATION, Tokyo, JP;
NATIONAL INSITUTE OF ADVANCED INDUSTRIAL SCIENCE AND TECHNOLOGY, Tokyo, JP;
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
H10D 30/69 (2025.01); H10D 30/01 (2025.01); H10D 62/80 (2025.01); H10D 62/834 (2025.01);
U.S. Cl.
CPC ...
H10D 30/751 (2025.01); H10D 62/80 (2025.01); H10D 62/834 (2025.01); H10D 30/0413 (2025.01); H10D 30/69 (2025.01);
Abstract
A semiconductor device, including an insulating film provided on a substrate, a chlorine-containing semiconductor layer provided adjacent to the insulating film, and a semiconductor region provided adjacent to the chlorine-containing semiconductor layer, wherein a chlorine concentration in the chlorine-containing semiconductor layer is 1.0×10atoms/cmor more and 1.0×10atoms/cmor less.