The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
May. 26, 2026
Filed:
Dec. 27, 2023
Daihen Corporation, Osaka, JP;
Yuichi Hasegawa, Osaka, JP;
Yuya Ueno, Osaka, JP;
DAIHEN Corporation, Osaka, JP;
Abstract
A high-frequency power supply system according to the present disclosure includes a first power supply, a second power supply, a first matcher, and a second matcher. The second power supply performs pulse modulation of repeating an ON operation of outputting a second forward wave voltage and an OFF operation of not outputting the second forward wave voltage. The first power supply performs frequency modulation control in a second power supply ON period, and performs frequency offset control of outputting a forward wave voltage VFhaving a fundamental frequency obtained by adding an offset frequency to a fundamental frequency in a second power supply OFF period. The second matcher generates a phase reset signal having a frequency lower than a fundamental frequency based on detection information of a forward wave voltage, and supplies the phase reset signal to the first power supply.