The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
May. 26, 2026

Filed:

Dec. 26, 2023
Applicant:

Daihen Corporation, Osaka, JP;

Inventors:

Yuya Ueno, Osaka, JP;

Yuichi Hasegawa, Osaka, JP;

Assignee:

DAIHEN Corporation, Osaka, JP;

Attorney:
Primary Examiner:
Int. Cl.
CPC ...
H01J 37/32 (2006.01); H03H 7/01 (2006.01);
U.S. Cl.
CPC ...
H01J 37/32009 (2013.01); H03H 7/0115 (2013.01); H01J 2237/327 (2013.01); H01J 2237/334 (2013.01);
Abstract

A high-frequency power supply device includes a first power supply that outputs a high-frequency AC voltage having a first frequency, a second power supply that outputs a DC pulse voltage including one or more continuous pulse waveforms, a matching box that receives the high-frequency AC voltage, performs impedance matching such that impedance viewed from the first power supply becomes constant, and outputs the high-frequency AC voltage, a filter that receives the DC pulse voltage, filters the DC pulse voltage, and outputs the DC pulse voltage to a pulse-power input terminal of a load, and an IMD suppression circuit that includes a first inductor having predetermined inductance provided between the matching box and an AC-power input terminal of the load, receives the high-frequency AC voltage, allows the input high-frequency AC voltage to pass through the first inductor, and outputs the high-frequency AC voltage to the AC-power input terminal of the load.


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