Optical interferometric range sensor

Abstract

An optical interferometric range sensor includes a light source that emits light with a changing wavelength, an interferometer that receives the light emitted from the light source and generates interference light based on measurement light emitted from a sensor head to a measurement target and reflected from the measurement target and reference light traveling on an optical path at least partially different from an optical path of the measurement light, a light receiver that receives the interference light from the interferometer to convert the interference light to an electric signal, a processor that calculates a distance from the sensor head to the measurement target based on the electric signal resulting from conversion performed by the light receiver, an identifier that identifies the sensor head based on a beat signal generated by the interferometer, and a setter that sets a measurement condition corresponding to the sensor head identified by the identifier.