The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
May. 26, 2026
Filed:
Jan. 10, 2023
Applicant:
Magnolia White Corporation, Tokyo, JP;
Inventors:
Takanobu Takenaka, Tokyo, JP;
Atsushi Takeda, Tokyo, JP;
Assignee:
MAGNOLIA WHITE CORPORATION, Tokyo, JP;
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
C23C 16/455 (2006.01); C23C 16/448 (2006.01); H10K 50/10 (2023.01); H10K 71/10 (2023.01);
U.S. Cl.
CPC ...
C23C 16/45563 (2013.01); C23C 16/448 (2013.01); H10K 50/10 (2023.02); H10K 71/10 (2023.02);
Abstract
According to one embodiment, a deposition device includes a stage, a deposition head opposed to the stage, and a chamber accommodating the stage and the deposition head. The deposition head comprises a deposition source heating a material and generating vapor, a nozzle connected to the deposition source to emit the vapor generated by the deposition source, a control plate comprising a sleeve surrounding the nozzle, and a movement mechanism moving the control plate along an extension direction of the sleeve.