The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
May. 26, 2026
Filed:
Mar. 14, 2024
Applicants:
Kabushiki Kaisha Toshiba, Tokyo, JP;
Tohoku University, Sendai, JP;
Inventors:
Kenya Uchida, Yokohama, JP;
Hiroyuki Fukui, Yokkaichi, JP;
Ikuo Uematsu, Yokohama, JP;
Takeaki Iwamoto, Sendai, JP;
Eunsang Kwon, Sendai, JP;
Assignees:
KABUSHIKI KAISHA TOSHIBA, Tokyo, JP;
TOHOKU UNIVERSITY, Sendai, JP;
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
C23C 16/30 (2006.01); A62D 3/36 (2007.01); C23C 16/56 (2006.01); C30B 19/10 (2006.01); C30B 19/12 (2006.01); H10P 72/00 (2026.01); A62D 101/40 (2007.01); C23C 16/44 (2006.01);
U.S. Cl.
CPC ...
C23C 16/30 (2013.01); A62D 3/36 (2013.01); C23C 16/56 (2013.01); C30B 19/10 (2013.01); C30B 19/12 (2013.01); H10P 72/0402 (2026.01); A62D 2101/40 (2013.01); C23C 16/4412 (2013.01);
Abstract
According to one embodiment, a treatment solution is provided. The treatment solution is used for treating halosilanes having a cyclic structure. The treatment solution includes at least one of an inorganic base or an organic base and being basic.