The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
May. 26, 2026
Filed:
May. 25, 2023
Applicant:
Tdk Corporation, Tokyo, JP;
Inventors:
Yohei Sato, Tokyo, JP;
Hiroshi Koizumi, Tokyo, JP;
Toshinobu Miyagoshi, Tokyo, JP;
Osamu Shindo, Tokyo, JP;
Seijiro Sunaga, Tokyo, JP;
Makoto Yamashita, Tokyo, JP;
Yasuo Kato, Tokyo, JP;
Mitsuyoshi Makida, Tokyo, JP;
Masashi Matsumoto, Tokyo, JP;
Assignee:
TDK CORPORATION, Tokyo, JP;
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
B23Q 3/02 (2006.01); H01L 21/603 (2006.01); H10W 72/00 (2026.01);
U.S. Cl.
CPC ...
B23Q 3/02 (2013.01); H10W 72/07232 (2026.01);
Abstract
A substrate processing apparatushaving a lower jig platefor arranging a substrateas an object to be pressurized, a support memberincluding an installation portionfor installing columnar memberssupporting the lower jig plate, in which the columnar membersare placed to the installation portionin accordance with a in-plane distribution of a load applied to the lower jig plate