Phase shifter comprising signal and reference electrodes on a substrate, where the reference electrodes include sub-electrodes separated by gaps spanned by membrane bridges

Abstract

A radio frequency device and an electronic device are provided. The radio frequency device includes: a first dielectric substrate and at least one phase shift unit, each including a signal electrode and a first and second reference electrodes; first and/or second reference electrodes include reference sub-electrodes arranged side by side, and first gaps between every two adjacent reference sub-electrodes; the signal electrode includes a main structure between the first and second reference electrodes and branch structures electrically connected to the main structure, and each branch structure extends into one corresponding first gap; the radio frequency device further includes membrane bridges on a side of a first insulating layer away from the first dielectric substrate, and a first insulating layer covering the branch structures, each membrane bridge spans one corresponding first gap, and a bridge floor of each membrane bridge and the first insulating layer have a first distance therebetween.