The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
May. 19, 2026
Filed:
Apr. 15, 2022
Massachusetts Institute of Technology, Cambridge, MA (US);
John Cummings, Stoneham, MA (US);
George Haldeman, Lexington, MA (US);
Lawrence Narkewich, West Roxbury, MA (US);
Sergey K. Tolpygo, Waltham, MA (US);
John Ingwersen, Portsmouth, NH (US);
Massachusetts Institute of Technology, Cambridge, MA (US);
Abstract
Described is a probing system and technique for testing superconducting and low-temperature circuitry at the wafer level. In embodiments, the system includes a helium convection loop such as a passive helium convection loop. The use of a passive helium convection loop enables the use of welded flexible bellows hoses. Also described is a wafer holding structure having a fixed portion configured to be removably secured to a wafer to be tested and a second portion configured to be removably secured to the fixed portion and configured to remain in a testing chamber portion of a wafer probing system and configured to provide force application and alignment functionality to a wafer to be tested.