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The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Patent No.:

US 12631665 B1

PDFFull Text
Date of Patent:
May. 19, 2026

Filed:

Jan. 10, 2023

Inertial sensor, method for manufacturing inertial sensor, and inertial measurement unit

Applicant:

Seiko Epson Corporation, Tokyo, JP;

Inventor:

Teruo Takizawa, Matsumoto, JP;

Assignee:

SEIKO EPSON CORPORATION, , JP;

Attorney:

Harness, Dickey & Pierce, P.L.C.

Primary Examiner:

Stephen D Meier

Assistant Examiner:

Ruben C Parco, Jr.

Int. Cl.
CPC ...
G01C 19/5783 (2012.01); B81B 7/00 (2006.01); B81C 1/00 (2006.01); G01P 3/483 (2006.01); G01P 15/125 (2006.01); G01P 15/18 (2013.01);
U.S. Cl.
CPC ...
G01P 15/125 (2013.01); B81B 7/0038 (2013.01); B81C 1/00285 (2013.01); G01P 3/483 (2013.01); G01P 15/18 (2013.01); B81B 2201/0235 (2013.01); B81B 2201/0242 (2013.01); B81C 2203/019 (2013.01);
Abstract

An inertial sensorincludes: a base body; a lid body facing the base body; a functional element disposed in a cavity between the base body and the lid body and including a semiconductor layer; an adhesive layer disposed in a peripheral region surrounding the cavity and adhering the base body and the lid body to each other; and a sealer configured to seal a hole which communicates the cavity with an outside and which is disposed in the peripheral region. The sealer is provided in contact with the lid body and the base body, and includes a material of the lid body and a material of the adhesive layer.

Find Patent Forward Citations

Takizawa, Teruo. (2026). Inertial sensor, method for manufacturing inertial sensor, and inertial measurement unit (U.S. Patent No. 12631665). U.S. Patent and Trademark Office. https://idiyas.com/patent/badge/12631665

Data source: USPTO (United States Patent and Trademark Office) public patent records. Weekly synchronization. How IDiyas builds this profile

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