The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
May. 19, 2026

Filed:

Mar. 08, 2023
Applicant:

Tdk Corporation, Tokyo, JP;

Inventors:

Naoki Ohta, Tokyo, JP;

Shinji Hara, Tokyo, JP;

Susumu Aoki, Tokyo, JP;

Maiko Kokubo, Tokyo, JP;

Kazuya Maekawa, Tokyo, JP;

Tadao Senriuchi, Tokyo, JP;

Assignee:

TDK Corporation, Tokyo, JP;

Attorney:
Primary Examiner:
Int. Cl.
CPC ...
G01J 5/20 (2006.01); H10F 39/18 (2025.01);
U.S. Cl.
CPC ...
G01J 5/20 (2013.01); G01J 2005/202 (2013.01); H10F 39/184 (2025.01);
Abstract

Electromagnetic wave sensor (infrared sensor) has a first substrate; a second substrate that faces the first substrate and that allows infrared rays to pass through at least a part of the second substrate; first circumferential wall that is positioned between the first substrate and the second substrate and that forms first space together with the first and second substrates; bolometer structures that are provided in first space; first measuring element that is provided in first space and that is used for taking a first measurement relating to pressure in first space; and a monitoring portion. The monitoring portion acquires the first measurement that is taken using first measuring element and outputs a predetermined signal indicating an abnormality based on at least the first measurement.


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