The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
May. 12, 2026
Filed:
Jan. 24, 2023
Applicant:
Universal Display Corporation, Ewing, NJ (US);
Inventors:
Jeff Hawthorne, Palo Alto, CA (US);
Sriram Krishnaswami, Saratoga, CA (US);
Kent Khuong Nguyen, San Jose, CA (US);
Assignee:
Universal Display Corporation, Ewing, NJ (US);
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
H10K 71/60 (2023.01); C23C 14/12 (2006.01); C23C 14/22 (2006.01); C23C 14/50 (2006.01);
U.S. Cl.
CPC ...
H10K 71/611 (2023.02); C23C 14/12 (2013.01); C23C 14/228 (2013.01); C23C 14/50 (2013.01);
Abstract
A chuck for holding a workpiece in a deposition system is provided, which includes a base having a base surface with a flatness tolerance of not greater than 30 μm and a clamp having a surface configured to be attached to a substrate, which has a flatness tolerance of not greater than 30 μm. The clamp also includes a substrate holder configured to hold a substrate above the second clamp surface.