The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
May. 12, 2026

Filed:

Feb. 05, 2019
Applicant:

Mitsubishi Electric Corporation, Tokyo, JP;

Inventors:

Ryohei Nonoda, Tokyo, JP;

Atsushi Era, Tokyo, JP;

Assignee:
Attorney:
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
H10D 30/47 (2025.01); H10D 62/85 (2025.01);
U.S. Cl.
CPC ...
H10D 30/475 (2025.01); H10D 62/8503 (2025.01);
Abstract

A semiconductor device according to the present invention includes a substrate, a plurality of semiconductor layers to be overlaid on the substrate and a gate electrode, a drain electrode, and a source electrode provided on the plurality of semiconductor layers, wherein each of the plurality of semiconductor layers includes a channel layer made with GaN and a barrier layer provided in contact with an upper surface of the channel layer and made with AlGaN, and a carbon concentration of the channel layer included in an uppermost semiconductor layer among the plurality of semiconductor layers is lower than an average value of carbon concentration of the channel layer included in the at least one semiconductor layer other than the uppermost semiconductor layer among the plurality of semiconductor layers.


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