Semiconductor memory device

Abstract

A semiconductor memory device may include a substrate including a cell array region and a peripheral circuit region, an active pattern on the cell array region of the substrate, a peripheral active pattern on the peripheral circuit region of the substrate, a peripheral gate electrode disposed on a top surface of the peripheral active pattern, a first interlayer insulating pattern provided on the cell array region to cover a top surface of the active pattern, a first etch stop layer covering the first interlayer insulating pattern and the peripheral gate electrode with a uniform thickness, and a second interlayer insulating pattern disposed on the first etch stop layer and in the peripheral circuit region. In the cell array region, the second interlayer insulating pattern may have a top surface, which is located at substantially the same level as a top surface of the first etch stop layer.