The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
May. 12, 2026

Filed:

Feb. 23, 2024
Applicant:

Nissin Ion Equipment Co., Ltd., Koka City, JP;

Inventors:

George Sacco, Groveland, MA (US);

Sami K. Hahto, Nashua, NH (US);

Attorney:
Primary Examiner:
Int. Cl.
CPC ...
C23C 14/48 (2006.01); H01J 37/32 (2006.01);
U.S. Cl.
CPC ...
H01J 37/32412 (2013.01); C23C 14/48 (2013.01); H01J 37/32055 (2013.01);
Abstract

An ion source includes a vaporizer, an arc chamber, and an extraction electrode. The vaporizer includes a crucible and a heater. The crucible stores a solid material. The heater heats the crucible. The crucible has an interior space formed by a wall, an inlet connected to the wall that releases a reactive gas into the interior space, and an outlet connected to the wall that releases the reactive gas and a vapor of the reaction product generated by a reaction between the solid material and the reactive gas from the interior space. The interior space narrows toward at least one of the inlet and the outlet.


Find Patent Forward Citations

Sacco, George. (2026). Vaporizer and ion source (U.S. Patent No. 12626888). U.S. Patent and Trademark Office. https://idiyas.com/patent/badge/12626888

Data source: USPTO (United States Patent and Trademark Office) public patent records. Weekly synchronization. How IDiyas builds this profile

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