The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
May. 12, 2026

Filed:

Jul. 06, 2022
Applicants:

Nuctech Company Limited, Beijing, CN;

Tsinghua University, Beijing, CN;

Inventors:

Li Zhang, Beijing, CN;

Zhiqiang Chen, Beijing, CN;

Qingping Huang, Beijing, CN;

Hui Ding, Beijing, CN;

Yong Zhou, Beijing, CN;

Xin Jin, Beijing, CN;

Liming Yao, Beijing, CN;

Assignees:

Nuctech Company Limited, Beijing, CN;

Tsinghua University, Beijing, CN;

Attorney:
Primary Examiner:
Int. Cl.
CPC ...
G01N 23/10 (2018.01); G01N 23/046 (2018.01); G01N 23/083 (2018.01);
U.S. Cl.
CPC ...
G01N 23/10 (2013.01); G01N 23/046 (2013.01); G01N 23/083 (2013.01); G01N 2223/3303 (2013.01); G01N 2223/643 (2013.01);
Abstract

Provided are an inspection system and an inspection method, the inspection system includes: a carrying device (); at least one ray source () each includes a separate housing () to define a vacuum space and target spots enclosed within the housing (), and a detector assembly (). The at least one ray source () is rotatable between a plurality of scanning positions around a rotation axis relative to the carrying device (). The at least one ray source () and the detector assembly () may be lifted or lowered along the rotation axis relative to the carrying device (). When the at least one ray source () is located at one of scanning positions relative to the carrying device (), the at least one ray source () and the detector assembly () are lifted or lowered along the rotation axis relative to the carrying device () and the at least one ray source () emits X-rays. After the at least one ray source () and the detector assembly () are lifted or lowered a predetermined distance relative to the carrying device (), the at least one ray source () rotates around the rotation axis relative to the carrying device () to another one of scanning positions.


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