The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
May. 12, 2026

Filed:

Mar. 21, 2024
Applicant:

Seiko Epson Corporation, Tokyo, JP;

Inventor:

Kohei Yamada, Shiojiri, JP;

Assignee:
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
G01N 21/31 (2006.01); G01B 11/02 (2006.01); G01J 3/45 (2006.01);
U.S. Cl.
CPC ...
G01N 21/31 (2013.01); G01B 11/02 (2013.01); G01J 3/45 (2013.01); G01N 2201/06113 (2013.01); G01N 2201/0636 (2013.01);
Abstract

An optical device includes: an analysis optical system; and a length measurement optical system. The analysis optical system includes a moving mirror configured to reflect analysis light to add a first modulation signal to the analysis light, a gas cell with a gas that absorbs light of a predetermined wavelength sealed therein and configured to add a light absorption signal to the analysis light, and a first light receiving element configured to receive the analysis light including a sample-derived signal, the first modulation signal, and the light absorption signal. The length measurement optical system includes a second light source and obtains a displacement signal corresponding to a position of the moving mirror using laser light.


Find Patent Forward Citations

Loading…