The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
May. 12, 2026
Filed:
Mar. 23, 2022
Applicant:
Sitime Corporation, Santa Clara, CA (US);
Inventors:
Nicholas Miller, Sunnyvale, CA (US);
Ginel C. Hill, Sunnyvale, CA (US);
Charles I. Grosjean, Los Gatos, CA (US);
Michael Julian Daneman, Campbell, CA (US);
Paul M. Hagelin, Saratoga, CA (US);
Aaron Partridge, Cupertino, CA (US);
Assignee:
SiTime Corporation, Sunnyvale, CA (US);
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
B81B 7/02 (2006.01); B81C 1/00 (2006.01); H02H 9/04 (2006.01); H10W 70/60 (2026.01);
U.S. Cl.
CPC ...
B81B 7/02 (2013.01); B81C 1/00063 (2013.01); B81C 1/00095 (2013.01); H02H 9/045 (2013.01); H10W 70/60 (2026.01);
Abstract
A semiconductor device includes first and second exposed electrical contacts and a cavity having a microelectromechanical system (MEMS) structure therein. A conductive path extends from the first exposed electrical contact to the cavity and an over-voltage protection element electrically is coupled between the first and second exposed electrical contacts.