The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
May. 12, 2026
Filed:
Apr. 26, 2023
Applicant:
Samsung Electronics Co., Ltd., Suwon-si, KR;
Inventors:
Assignee:
Samsung Electronics Co., Ltd., Gyeonggi-do, KR;
Attorney:
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
B08B 1/12 (2024.01); B08B 1/20 (2024.01); B08B 3/02 (2006.01); B08B 3/08 (2006.01); B24B 53/017 (2012.01); C08L 29/04 (2006.01); C08L 39/02 (2006.01); C08L 39/04 (2006.01); C08L 39/06 (2006.01); C08L 71/02 (2006.01); C08L 79/02 (2006.01); C08L 101/16 (2006.01); H01L 21/02 (2006.01); H01L 21/67 (2006.01); H01L 21/768 (2006.01);
U.S. Cl.
CPC ...
B08B 1/12 (2024.01); B08B 1/20 (2024.01); B08B 3/022 (2013.01); B08B 3/08 (2013.01); B24B 53/017 (2013.01); H01L 21/02065 (2013.01); H01L 21/02074 (2013.01); H01L 21/76819 (2013.01); H01L 21/7684 (2013.01);
Abstract
A substrate cleaning apparatus may include a first roll member and a second roll member including a copolymer of a first water-soluble polymer and a second water-soluble polymer. The first roll member may include a first roll body extending in a first direction and first protrusions on a surface of the first roll body. The second roll member may include a second roll body extending in the first direction and second protrusions on a surface of the second roll body.