The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
May. 05, 2026
Filed:
Dec. 20, 2023
Applicant:
Screen Holdings Co., Ltd., Kyoto, JP;
Inventors:
Assignee:
SCREEN HOLDINGS CO., LTD., , JP;
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
H01L 21/687 (2006.01); A46B 13/00 (2006.01); A46B 13/02 (2006.01); B08B 1/12 (2024.01); B08B 1/20 (2024.01); B08B 1/36 (2024.01); B08B 3/02 (2006.01); B08B 3/04 (2006.01); B08B 13/00 (2006.01); H01L 21/02 (2006.01); H01L 21/67 (2006.01);
U.S. Cl.
CPC ...
H01L 21/68735 (2013.01); A46B 13/008 (2013.01); A46B 13/02 (2013.01); B08B 1/12 (2024.01); B08B 1/20 (2024.01); B08B 1/36 (2024.01); B08B 3/022 (2013.01); B08B 3/041 (2013.01); B08B 13/00 (2013.01); H01L 21/02057 (2013.01); H01L 21/67046 (2013.01); H01L 21/67051 (2013.01); H01L 21/67253 (2013.01); H01L 21/68707 (2013.01); H01L 21/68742 (2013.01); A46B 2200/3073 (2013.01); B08B 2203/02 (2013.01);
Abstract
A substrate is held by an upper holding device, and a lower-surface center region of the substrate is cleaned with use of a lower-surface brush. The substrate is lowered from an upper holding device and transferred to a suction holder of a lower holding device. The substrate held by the suction holder is cleaned with use of a processing liquid. A cup is provided to be liftable and lowerable between an upper cup position and a lower cup position. The cup is in the lower cup position when waiting. A period for the substrate lowering operation and a period for the cup lifting operation at least partially overlap with each other.