The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
May. 05, 2026
Filed:
Dec. 15, 2022
Seiko Epson Corporation, Tokyo, JP;
SEIKO EPSON CORPORATION, Tokyo, JP;
Abstract
A method for manufacturing a resonator element includes: a substrate preparation step of preparing a substrate; an etching step of performing an etching process on the substrate to form a resonator element, a frame portion, and a holding portion that couples the resonator element and the frame portion; and a break-off step of breaking off the resonator element from the frame portion. The holding portion includes a narrow portion in which a part of a width is narrow. The width of the narrow portion is minimum at a position closer to a resonator element side than at a center of the holding portion. In a cross-sectional view, an angle formed by a side surface of the narrow portion with respect to a flat surface of the holding portion is in a range of 85° or more and 95° or less. The etching process is dry etching.
Data source: USPTO (United States Patent and Trademark Office) public patent records. Weekly synchronization. How IDiyas builds this profile