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The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Patent No.:

US 12616006 B1

PDFFull Text
Date of Patent:
Apr. 28, 2026

Filed:

Oct. 18, 2022

Deuterium-containing films

Applicant:

Applied Materials, Inc., Santa Clara, CA (US);

Inventors:

Sean M. Seutter, San Jose, CA (US);

Mun Kyu Park, San Jose, CA (US);

Hien M Le, San Jose, CA (US);

Chih-Chiang Chuang, Milpitas, CA (US);

Assignee:

Applied Materials, Inc., Santa Clara, CA (US);

Attorney:

Servilla Whitney LLC

Primary Examiner:

Joseph A Miller, Jr

Int. Cl.
CPC ...
H01L 21/30 (2006.01); C23C 16/28 (2006.01); C23C 16/455 (2006.01); H01L 21/223 (2006.01); H01L 21/265 (2006.01); H01L 21/768 (2006.01);
U.S. Cl.
CPC ...
H01L 21/3003 (2013.01); C23C 16/28 (2013.01); C23C 16/45538 (2013.01); C23C 16/45548 (2013.01); H01L 21/2236 (2013.01); H01L 21/265 (2013.01); H01L 21/76856 (2013.01);
Abstract

Films are modified to include deuterium in an inductive high density plasma chamber. Chamber hardware designs enable tunability of the deuterium concentration uniformity in the film across a substrate. Manufacturing of solid state electronic devices include integrated process flows to modify a film that is substantially free of hydrogen and deuterium to include deuterium.

Find Patent Forward Citations

Seutter, Sean. (2026). Deuterium-containing films (U.S. Patent No. 12616006). U.S. Patent and Trademark Office. https://idiyas.com/patent/badge/12616006

Data source: USPTO (United States Patent and Trademark Office) public patent records. Weekly synchronization. How IDiyas builds this profile

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