The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Apr. 28, 2026
Filed:
Oct. 22, 2019
Applicant:
Soleras Advanced Coatings Bv, Deinze, BE;
Inventors:
Assignee:
SOLERAS ADVANCED COATINGS BV, Deinze, BE;
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
H01J 37/34 (2006.01); C23C 14/35 (2006.01); C23C 14/54 (2006.01);
U.S. Cl.
CPC ...
H01J 37/3476 (2013.01); C23C 14/35 (2013.01); C23C 14/54 (2013.01); H01J 37/3405 (2013.01); H01J 37/3435 (2013.01);
Abstract
A magnetron structure is described for use in a sputtering apparatus. The magnetron structure comprises a magnetron and a controller rigidly connected to the magnetron. The controller is adapted for at least partly controlling a condition and/or a functioning of the sputtering unit.
De Bosscher, Wilmert. (2026). Magnetron with controller for monitoring and control (U.S. Patent No. 12614706). U.S. Patent and Trademark Office. https://idiyas.com/patent/badge/12614706
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