The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Apr. 28, 2026
Filed:
Nov. 18, 2020
Tdk Corporation, Tokyo, JP;
Matthias König, Munich, DE;
TDK Corporation, Tokyo, JP;
Abstract
In an embodiment a method includes providing a substrate with an electrical functional layer comprising a plurality of functional regions, wherein the functional regions are electrically addressable independently from each other, wherein the plurality of functional regions comprises at least a first group of functional regions and a second group of functional regions, wherein the first group is different from the second group, and wherein at least one functional region is part of the first group and of the second group and performing a multiple-mask process by applying a first mask on the electrical functional layer, wherein the first mask exposes the functional regions of the first group and covers all other functional regions, applying a first sensor material over the exposed functional regions by sputtering, removing the first mask, applying a second mask on the electrical functional layer, wherein the second mask exposes the functional regions of the second group and covers all other functional regions, applying a second sensor material over the exposed functional regions by sputtering and/or performing a functionalizing treatment in the exposed functional regions and removing the second mask.