The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Apr. 28, 2026
Filed:
Sep. 15, 2023
Nalux Co., Ltd., Osaka, JP;
Riken, Wako, JP;
Toyota School Foundation, Nagoya, JP;
Minoru Sasaki, Nagoya, JP;
Noboru Ebizuka, Wako, JP;
Makio Nishimaki, Osaka, JP;
Takayuki Okamoto, Niiza, JP;
Kazuya Yamamoto, Osaka, JP;
Makoto Okada, Osaka, JP;
Yutaka Yamagata, Wako, JP;
Kazuto Saiki, Kusatsu, JP;
Yusuke Nakauchi, Kusatsu, JP;
Abstract
A method of producing a diffraction grating of borosilicate glass or barium borosilicate glass, the method comprising the steps of forming a grating on a surface of a silicon wafer the grating through the Bosch process; forming an oxide film on a surface of the grating by heating and exposure to water vapor of the silicon wafer; removing the oxide film using hydrofluoric acid; making the surface provided with the grating of the silicon wafer and a surface of a glass plate undergo anodic bonding; heating the silicon wafer and the glass plate bonded to each other; polishing a surface opposite to the boded surface of the silicon wafer and a surface opposite to the boded surface of the glass plate; and removing silicon from the glass plate by selective etching using xenon difluoride.