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The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Patent No.:

US 12612580 B1

PDFFull Text
Date of Patent:
Apr. 28, 2026

Filed:

Jun. 23, 2022

Treatment liquid for semiconductor wafers, which contains hypochlorite ions

Applicant:

Tokuyama Corporation, Yamaguchi, JP;

Inventors:

Takafumi Shimoda, Yamaguchi, JP;

Takayuki Negishi, Yamaguchi, JP;

Yuki Kikkawa, Yamaguchi, JP;

Seiji Tono, Yamaguchi, JP;

Assignee:

Tokuyama Corporation, Yamaguchi, JP;

Attorney:

CAHN & SAMUELS, LLP

Primary Examiner:

Gregory R Delcotto

Int. Cl.
CPC ...
C11D 3/395 (2006.01); C11D 3/24 (2006.01); C11D 3/30 (2006.01); C11D 7/28 (2006.01); C11D 7/32 (2006.01); C11D 7/50 (2006.01); C11D 7/54 (2006.01); H10P 70/00 (2026.01);
U.S. Cl.
CPC ...
C11D 7/3209 (2013.01); C11D 3/24 (2013.01); C11D 3/30 (2013.01); C11D 7/28 (2013.01); C11D 7/5004 (2013.01); H10P 70/54 (2026.01); H10P 70/56 (2026.01); C11D 2111/22 (2024.01);
Abstract

A treatment liquid for cleaning a semiconductor wafer is a treatment liquid containing (A) a hypochlorite ion and (C) a solvent, in which pH at 25° C. is more than 7 and less than 12.0. A method for removing ruthenium and tungsten from a semiconductor wafer and cleaning the semiconductor wafer includes bringing the treatment liquid into contact with the semiconductor wafer containing ruthenium or tungsten is provided.

Find Patent Forward Citations

Shimoda, Takafumi. (2026). Treatment liquid for semiconductor wafers, which contains hypochlorite ions (U.S. Patent No. 12612580). U.S. Patent and Trademark Office. https://idiyas.com/patent/badge/12612580

Data source: USPTO (United States Patent and Trademark Office) public patent records. Weekly synchronization. How IDiyas builds this profile

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