The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Apr. 21, 2026
Filed:
Jun. 20, 2023
Sumitomo Chemical Company, Limited, Tokyo, JP;
Katsuhiro Komuro, Osaka, JP;
Koji Ichikawa, Osaka, JP;
SUMITOMO CHEMICAL COMPANY, LIMITED, Tokyo, JP;
Abstract
Disclosed are a carboxylate represented by formula (I), a carboxylic acid generator and a resist composition: wherein Land Leach represent a single bond or a hydrocarbon group which may have a substituent, —CH— included in the hydrocarbon group may be replaced by —O—, —S—, —SO— or —CO—, Arrepresents an aromatic hydrocarbon group or a heterocyclic aromatic hydrocarbon group, Rrepresents *—O—R, *—O—CO—R, etc., Rrepresents an acid-labile group, Rrepresents a halogen atom, a haloalkyl group or a hydrocarbon group, the hydrocarbon group may have a substituent, —CH— included in the haloalkyl group and the hydrocarbon group may be replaced by —O—, —CO—, —S— or —SO—, m4 represents an integer of 0 to 8, and Zrepresents an organic cation.