The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Apr. 21, 2026

Filed:

May. 25, 2022
Applicant:

Seiko Epson Corporation, Tokyo, JP;

Inventors:

Kohei Yamada, Shiojiri, JP;

Takeshi Shimizu, Chino, JP;

Assignee:
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
G01B 9/02 (2022.01); G02B 5/18 (2006.01); G02B 6/02 (2006.01); G02B 27/28 (2006.01);
U.S. Cl.
CPC ...
G02B 27/283 (2013.01); G01B 9/02045 (2013.01); G01B 9/02083 (2013.01); G02B 5/1861 (2013.01); G02B 6/02076 (2013.01); G01B 2290/70 (2013.01);
Abstract

A laser interferometer that includes a light source which emits laser light, an optical divider that divides the laser light into a first optical path and a second optical path, an optical modulator being provided on the first optical path or the second optical path, including an oscillator that oscillates when a current is applied, and modulate the laser light by using the oscillator, a photoreceptor that receives the laser light and output a photoreception signal, the laser light being reflected by an object to be measured that is provided on the first optical path or the second optical path, and a demodulation circuit that demodulates, from the photoreception signal, a Doppler signal derived from the object to be measured, based on a reference signal and a modulation signal derived from the optical modulator.


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