The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Apr. 21, 2026
Filed:
Aug. 29, 2023
Watlow Electric Manufacturing Company, St. Louis, MO (US);
Robert E. Johnston, St. Louis, MO (US);
Daniel Gander, St. Louis, MO (US);
Chelsea Hogard, St. Louis, MO (US);
Miranda Pizzella, St. Louis, MO (US);
Andrew D. Selvy, St. Louis, MO (US);
WATLOW ELECTRIC MANUFACTURING COMPANY, St. Louis, MO (US);
Abstract
A method of detecting a leak-induced abnormal condition in a semiconductor processing system comprising a subsystem. The method includes determining a performance characteristic and a temperature characteristic of the subsystem. The method includes detecting the leak-induced abnormal condition in the semiconductor processing system by determining that a leak-induced abnormal condition is present in the subsystem based on the performance characteristic and the temperature characteristic of the subsystem. The method also includes performing a corrective action when the leak-induced abnormal condition is detected.
Data source: USPTO (United States Patent and Trademark Office) public patent records. Weekly synchronization. How IDiyas builds this profile