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The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Patent No.:

US 12607484 B1

PDFFull Text
Date of Patent:
Apr. 21, 2026

Filed:

May. 12, 2021

Piezoelectric sensor with reduced process difficulty and manufacturing method therefor, and detection apparatus

Applicant:

Boe Technology Group Co., Ltd., Chaoyang District, CN;

Inventors:

Jing Niu, Beijing, CN;

Tingting Zhou, Beijing, CN;

Fangzhen Zhang, Beijing, CN;

Jintao Peng, Beijing, CN;

Assignee:

BOE Technology Group Co., Ltd., Chaoyang District, CN;

Attorney:

The Webb Law Firm

Primary Examiner:

Emily P Pham

Assistant Examiner:

Monica undefined Mata

Int. Cl.
CPC ...
G01D 5/14 (2006.01); H01L 27/20 (2006.01); H01L 41/047 (2006.01); H01L 41/113 (2006.01); H01L 41/187 (2006.01); H01L 41/29 (2013.01); H01L 41/311 (2013.01); H10N 30/06 (2023.01); H10N 30/071 (2023.01); H10N 30/30 (2023.01); H10N 30/853 (2023.01); H10N 30/87 (2023.01); H10N 39/00 (2023.01);
U.S. Cl.
CPC ...
G01D 5/14 (2013.01); H10N 30/06 (2023.02); H10N 30/071 (2023.02); H10N 30/302 (2023.02); H10N 30/308 (2023.02); H10N 30/8554 (2023.02); H10N 30/878 (2023.02); H10N 39/00 (2023.02);
Abstract

A piezoelectric sensor and a manufacturing method therefor, and a detection apparatus, which relate to the technical field of sensing. The piezoelectric sensor includes: an array substrate; a first capping layer located on the array substrate and including a first portion and a second portion, wherein the first portion covers the array substrate, a cavity is provided between the second portion and the array substrate, and the second portion is provided with a first opening; a first electrode located above the first capping layer and above the cavity, a piezoelectric thin film located on the first electrode; and a second electrode located on the piezoelectric thin film.

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