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B29C 65/52 (2006.01); B29C 65/00 (2006.01); B29L 31/34 (2006.01); B32B 3/26 (2006.01); B32B 3/30 (2006.01); B32B 7/12 (2006.01); C23C 14/50 (2006.01); C23C 16/458 (2006.01); H01J 37/32 (2006.01); H10P 72/00 (2026.01); H10P 72/72 (2026.01); H10P 72/76 (2026.01);

U.S. Cl.

CPC ...

C23C 16/4586 (2013.01); B29C 65/002 (2013.01); B29C 65/52 (2013.01); B29C 66/004 (2013.01); B29C 66/45 (2013.01); B32B 3/266 (2013.01); B32B 3/30 (2013.01); B32B 7/12 (2013.01); C23C 14/50 (2013.01); H01J 37/32715 (2013.01); H01J 37/32724 (2013.01); H10P 72/0434 (2026.01); H10P 72/722 (2026.01); H10P 72/7624 (2026.01); B29L 2031/34 (2013.01); B32B 2457/00 (2013.01); H01J 2237/2001 (2013.01); H01J 2237/2007 (2013.01);

Abstract

The present disclosure relates to a method of manufacturing a susceptor. The present disclosure may provide a method of manufacturing a susceptor in which a cap-type bushing structure or tube structure is applied to a bonding structure of a base substrate and an insulating plate, so that the bonding structure can withstand or prevent the increase in pressure inside a gas flow path during a curing process, thereby preventing clogging of a gas hole in a high-power susceptor or the like for a high aspect ratio contact (HARC) processes, and minimizing the occurrence of arcing by reducing contamination around the gas hole. In addition, the present disclosure may also provide a susceptor manufactured by the method.

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