The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Apr. 21, 2026
Filed:
Sep. 09, 2022
Applicant:
Canon Anelva Corporation, Kanagawa, JP;
Inventors:
Assignee:
CANON ANELVA CORPORATION, Kanagawa, JP;
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
C23C 14/58 (2006.01); C23C 14/06 (2006.01); C23C 14/18 (2006.01); C23C 14/34 (2006.01); C23C 14/50 (2006.01); C23C 14/54 (2006.01);
U.S. Cl.
CPC ...
C23C 14/5833 (2013.01); C23C 14/0641 (2013.01); C23C 14/18 (2013.01); C23C 14/3464 (2013.01); C23C 14/505 (2013.01); C23C 14/541 (2013.01); C23C 14/5873 (2013.01);
Abstract
A film forming apparatus has a process chamber and a processing unit provided in the process chamber and forming adhesive film. The surface of the inner walls of the process chamber is formed of a material having a large getter effect on gas or water (HO) remaining in the process chamber.