The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Apr. 21, 2026
Filed:
May. 24, 2023
Applicant:
Samsung Display Co., Ltd., Yongin-si, KR;
Inventors:
Assignee:
Samsung Display Co., Ltd., Yongin-si, KR;
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
C23C 14/04 (2006.01); C23C 14/24 (2006.01); H10K 59/12 (2023.01); H10K 71/16 (2023.01);
U.S. Cl.
CPC ...
C23C 14/042 (2013.01); C23C 14/24 (2013.01); H10K 59/1201 (2023.02); H10K 71/166 (2023.02);
Abstract
Disclosed is a deposition apparatus comprising a mask frame having a frame shape, masks on the mask frame, a magnet plate on the masks, rotating parts connected to a lower portion of the magnet plate, and magnet units connected to the rotating parts, and configured to be rotated by the rotating parts such that polarities of the magnet units are arranged in a direction crossing an extension direction of the masks.