The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Apr. 14, 2026
Filed:
Mar. 12, 2021
Applicant:
Nitto Denko Corporation, Ibaraki, JP;
Inventors:
Daisuke Nakamura, Ibaraki, JP;
Taketo Ishikawa, Ibaraki, JP;
Gaku Tsuburaoka, Ibaraki, JP;
Hironobu Machinaga, Ibaraki, JP;
Assignee:
NITTO DENKO CORPORATION, Ibaraki, JP;
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
H10N 30/00 (2023.01); H03H 9/58 (2006.01); H10N 30/057 (2023.01); H10N 30/076 (2023.01); H10N 30/079 (2023.01); H10N 30/50 (2023.01); H10N 30/87 (2023.01);
U.S. Cl.
CPC ...
H10N 30/708 (2024.05); H10N 30/057 (2023.02); H10N 30/076 (2023.02); H10N 30/079 (2023.02); H10N 30/50 (2023.02); H10N 30/877 (2023.02); H03H 9/585 (2013.01);
Abstract
A multilayer structure and a piezoelectric device using the same, which have satisfactory crystal orientation even in the submicron region of the thickness of a piezoelectric layer, are provided. The multilayer structure includes a first wurtzite thin film, a first hexagonal metal layer, a first electrode layer, a second hexagonal metal layer, and a second wurtzite thin film stacked in this order. The first electrode layer is formed of a metallic material having an acoustic impedance higher than that of the second wurtzite thin film.