The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Apr. 14, 2026
Filed:
Nov. 30, 2022
Nikon Corporation, Tokyo, JP;
Hideaki Nishino, Tokyo, JP;
Atsushi Hara, Tokyo, JP;
NIKON CORPORATION, Tokyo, JP;
Abstract
A stage apparatus includes a movable body having a first support surface for supporting an object, a support portion that is elastically deformable, has a predetermined thickness, and supports the movable body, a support device having a second support surface that supports the support portion, and a drive unit configured to move the movable body so that an angle between the first support surface and the second support surface is changed, wherein the support portion elastically deforms so that the predetermined thickness at a first side where an interval between the first support surface and the second support surface is narrow becomes small and the predetermined thickness at a second side where the interval between the first support surface and the second support surface is wide becomes large in accordance with a change in the angle caused by the drive unit to support the movable body.