The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Apr. 14, 2026
Filed:
Oct. 30, 2023
Seiko Epson Corporation, Tokyo, JP;
Satoru Tanaka, Chino, JP;
SEIKO EPSON CORPORATION, , JP;
Abstract
A MEMS device of an embodiment includes a substrate, fixed electrode portions, a movable body, fixed electrode fixing portions, a wiring structure, and a first wire. The fixed electrode portions are fixed relative to the substrate. The movable body is movable relative to the substrate. The fixed electrode fixing portions are electrically coupled to the fixed electrode portions. The wiring structure is provided in the same layer as those of the movable body and the fixed electrode portions with respect to the substrate. The first wire has one end coupled to the fixed electrode fixing portion. The wiring structure is at least provided in an opening part of the movable body, and the first wire is wired on the wiring structure via an insulating film and routed out of the movable body through the opening part of the movable body.