The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Apr. 14, 2026
Filed:
Feb. 24, 2023
SK Specialty Co., Ltd., Yeongju-si, KR;
Industry-university Cooperation Foundation Hanyang University Erica Campus, Ansan-si, KR;
Sungwoong Chung, Sejong-si, KR;
Junghun Kawk, Sejong-si, KR;
Jihun Lee, Sejong-si, KR;
Woohee Kim, Ansan-si, KR;
Jeongmin Lee, Ansan-si, KR;
Seohyun Lee, Ansan-si, KR;
SK SPECIALTY CO., LTD., Yeongju-si, KR;
INDUSTRY-UNIVERSITY COOPERATION FOUNDATION HANYANG UNIVERSITY ERICA CAMPUS, Ansan, KR;
Abstract
There is provided a substrate processing method. The method includes providing a substrate having a first surface area and a second surface area having a different surface state than that of the first surface area, exposing the substrate to a substrate surface treatment composition containing a deposition inhibitor, and exposing the substrate to a post-treatment composition containing HF.