The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Apr. 14, 2026

Filed:

Sep. 19, 2024
Applicant:

Resonac Corporation, Tokyo, JP;

Inventors:

Gohei Kurokawa, Chiba, JP;

Haruhisa Ohashi, Chiba, JP;

Takahiro Inoue, Tokyo, JP;

Assignee:
Attorney:
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
C23C 14/58 (2006.01); C23C 16/46 (2006.01); G11B 5/82 (2006.01); G11B 5/851 (2006.01); H10P 72/00 (2026.01);
U.S. Cl.
CPC ...
C23C 14/5806 (2013.01); C23C 16/46 (2013.01); G11B 5/82 (2013.01); G11B 5/851 (2013.01); H10P 72/0436 (2026.01);
Abstract

To provide a heating device capable of heating a surface of a workpiece having a disk shape with a hole in the center at high productivity and uniformity, a heating device for heating a workpiece by irradiating workpiece with light includes an irradiating part facing at least one of a pair of main surfaces of workpiece to irradiate workpiece with light. Irradiating part includes plurality of light emitting elements on surface thereof facing the at least one main surface. Surface of the irradiating part facing the workpiece includes first region including a position corresponding to the center of the workpiece, second region surrounding first region from outer side, and third region surrounding second region from outer side and including a position corresponding to the outer periphery of the workpiece. Amount of light emission per unit area in third region is greater than that in each of first and second regions.


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