The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Apr. 14, 2026

Filed:

Mar. 11, 2022
Applicant:

Semiconductor Energy Laboratory Co., Ltd., Atsugi, JP;

Inventors:

Shunpei Yamazaki, Setagaya, JP;

Ryota Hodo, Atsugi, JP;

Yasuhiro Jinbo, Isehara, JP;

Kenichi Okazaki, Atsugi, JP;

Attorneys:
Primary Examiner:
Int. Cl.
CPC ...
H10K 59/12 (2023.01); C23C 14/56 (2006.01); H10K 71/10 (2023.01); H10K 71/20 (2023.01); H10K 71/40 (2023.01);
U.S. Cl.
CPC ...
C23C 14/568 (2013.01); H10K 59/1201 (2023.02); H10K 71/10 (2023.02); H10K 71/231 (2023.02); H10K 71/40 (2023.02);
Abstract

Manufacturing equipment in which processes from processing to sealing of an organic compound film can be successively performed is provided. A patterning process of a light-emitting device and a sealing process that is performed to prevent the surface and side surface of an organic layer from being exposed to the air can be performed successively, whereby a minute light-emitting device with high luminance and high reliability can be formed. Moreover, the manufacturing equipment can be incorporated in in-line manufacturing equipment where apparatuses are arranged in the order of processes for a light-emitting device, resulting in high throughput manufacturing.


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