The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Apr. 14, 2026
Filed:
Nov. 11, 2022
Applicant:
Applied Materials, Inc., Santa Clara, CA (US);
Inventors:
Arvinder Manmohan Singh Chadha, San Jose, CA (US);
Christopher Beaudry, San Jose, CA (US);
Assignee:
Applied Materials, Inc., Santa Clara, CA (US);
Attorney:
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
B29C 65/00 (2006.01); C04B 37/00 (2006.01); C04B 38/00 (2006.01); C04B 41/00 (2006.01); C04B 41/53 (2006.01); C04B 41/91 (2006.01); B29C 65/02 (2006.01);
U.S. Cl.
CPC ...
C04B 37/001 (2013.01); C04B 37/005 (2013.01); C04B 38/0054 (2013.01); C04B 38/007 (2013.01); C04B 41/0045 (2013.01); C04B 41/5353 (2013.01); C04B 41/91 (2013.01); B29C 65/02 (2013.01); C04B 2237/10 (2013.01); C04B 2237/32 (2013.01); C04B 2237/58 (2013.01); C04B 2237/62 (2013.01);
Abstract
A method of forming a substrate support for use in a processing chamber includes forming a porous region in each of a plurality of ceramic green sheets, stacking the plurality of ceramic green sheets, each having the porous region formed therein, to form a ceramic laminate, and sintering the ceramic laminate to form a monolithic ceramic body having a porous plug formed therein. The porous plug includes the porous regions in the plurality of ceramic green sheets that are sintered.