The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Apr. 14, 2026
Filed:
Jan. 23, 2024
Applicant:
Applied Materials, Inc., Santa Clara, CA (US);
Inventors:
Hong Yan, Singapore, SG;
Raymond Hoiman Hung, Palo Alto, CA (US);
Ying Wang, Singapore, SG;
Xundong Dai, Singapore, SG;
Assignee:
Applied Materials, Inc., Santa Clara, CA (US);
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
B08B 3/08 (2006.01); B08B 3/04 (2006.01); B08B 3/12 (2006.01); H01L 21/02 (2006.01);
U.S. Cl.
CPC ...
B08B 3/08 (2013.01); B08B 3/041 (2013.01); B08B 3/123 (2013.01); H01L 21/02065 (2013.01); H01L 21/02074 (2013.01);
Abstract
Embodiments of the disclosure provided herein include systems and methods for cleaning semiconductor substrates The method includes rotating a substrate disposed on a substrate support, spraying a front side of the substrate using a cleaning agent including one or more chelating agents through a front side nozzle assembly disposed above the substrate support, and spraying a back side of the substrate using the cleaning agent through a back side dispenser assembly disposed below the substrate support.