The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Apr. 07, 2026
Filed:
May. 12, 2023
Ngk Insulators, Ltd., Nagoya-City, JP;
Tomohiro Hara, Handa-City, JP;
NGK INSULATORS, LTD., Nagoya, JP;
Abstract
There is provided an electrostatic chuck heater including: a ceramic plate having a first surface for bearing a wafer on which a film is to be deposited, and a second surface opposite the first surface, and including ESC electrodes and a heater electrode which are built therein; a ceramic shaft which is attached to the second surface of the ceramic plate and which comprises an internal space for accommodating an ESC rod connected to the ESC electrodes and a heater rod connected to the heater electrode; a plurality of lift pin holes penetrating the ceramic plate from the first surface to the second surface; and a plurality of protrusions arranged on the first surface of the ceramic plate with equal spacing from each other and with rotational symmetry about a central axis of each of the lift pin holes.
Data source: USPTO (United States Patent and Trademark Office) public patent records. Weekly synchronization. How IDiyas builds this profile