The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Apr. 07, 2026
Filed:
Aug. 30, 2022
Beijing Boe Optoelectronics Technology Co., Ltd., Beijing, CN;
Boe Technology Group Co., Ltd., Beijing, CN;
Qiuxu Wei, Beijing, CN;
Yue Li, Beijing, CN;
Lihui Wang, Beijing, CN;
Yanfei Ren, Beijing, CN;
Taonan Zhang, Beijing, CN;
Yuelei Xiao, Beijing, CN;
Yifan Wu, Beijing, CN;
Yulin Feng, Beijing, CN;
Xue Cao, Beijing, CN;
Kidong Han, Beijing, CN;
Qichang An, Beijing, CN;
Wenbo Chang, Beijing, CN;
Huiying Li, Beijing, CN;
Feng Qu, Beijing, CN;
BEIJING BOE OPTOELECTRONICS TECHNOLOGY CO., LTD., Beijing, CN;
BOE TECHNOLOGY GROUP CO., LTD., Beijing, CN;
Abstract
A bulk acoustic wave resonator, a manufacturing method thereof and a filter are provided and belong to the technical field of radio frequency micro-electro-mechanical system. The resonator includes a dielectric substrate, a first electrode, a piezoelectric layer, and a second electrode. The dielectric substrate has a first cavity penetrating through the dielectric substrate in a thickness direction thereof, and the first cavity includes a first opening penetrating through the first surface, and a second opening penetrating through the second surface. The first opening includes first sides sequentially arranged in a clockwise direction, and first connecting sides each connecting two adjacent first sides; the second opening includes second sides sequentially arranged in a clockwise direction, and second connecting sides each connecting two adjacent second sides. The first sides are in one-to-one correspondence with the second sides, and the first connecting sides are in one-to-one correspondence with the second connecting sides.