The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Apr. 07, 2026
Filed:
Feb. 23, 2023
Applicant:
Invensense, Inc., San Jose, CA (US);
Inventors:
Yoshitaka Sasaki, Uniondale, NY (US);
Jotaro Akiyama, Minami, JP;
Sal Akram, San Jose, CA (US);
Yaoching Wang, San Jose, CA (US);
Wang Shen Su, Hsinchu City, TW;
Tsung Lin Tang, Kaohsiung City, TW;
Ting-Yuan Liu, Zhubei City, TW;
Yuki Shibano, Tokyo, JP;
Chung-Hsien Lin, Hsinchu, TW;
Assignee:
InvenSense, Inc., San Jose, CA (US);
Attorneys:
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
G01L 9/12 (2006.01); B81C 1/00 (2006.01);
U.S. Cl.
CPC ...
G01L 9/12 (2013.01); B81C 1/00198 (2013.01); B81C 2201/0132 (2013.01);
Abstract
A pressure sensor includes a first electrode, a plurality of cavities, and a second electrode. The second electrode is disposed opposite the first electrode through the plurality of cavities. The second electrode includes a flat structure spanning two adjacent cavities of the plurality of cavities.