The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Apr. 07, 2026
Filed:
Feb. 06, 2023
Applied Materials, Inc., Santa Clara, CA (US);
Karunakaran Nataraj, Coimbatore, IN;
Sathiyamurthi Govindasamy, Coimbatore, IN;
Suresh Palanisamy, Coimbatore, IN;
Harish V. Penmethsa, Dublin, CA (US);
Naresh Kumar Asokan, Coimbatore, IN;
Applied Materials, Inc., Santa Clara, CA (US);
Abstract
Apparatus and methods for flipping substrates in vacuum between PVD sputtering of each side for increasing throughput are provided herein. In some embodiments disclosed herein, a module of a processing system for flipping a substrate in vacuum is provided. The module includes a clamp assembly for securing the substrate, a motor assembly coupled to the substrate clamp assembly, for rotating the clamp assembly, a lift pin assembly, and a lift pin actuator for raising and lowering the lift pin assembly.