The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Apr. 07, 2026
Filed:
Jul. 05, 2023
Applicant:
Samsung Display Co., Ltd., Yongin-si, KR;
Inventors:
Junhyeuk Ko, Yongin-si, KR;
Mingoo Kang, Yongin-si, KR;
Euigyu Kim, Yongin-si, KR;
Jongbum Kim, Yongin-si, KR;
Sukha Ryu, Yongin-si, KR;
Sang Min Yi, Yongin-si, KR;
Kyunghoon Chung, Yongin-si, KR;
Assignee:
SAMSUNG DISPLAY CO., LTD., Gyeonggi-Do, KR;
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
C23C 14/04 (2006.01); H10K 71/10 (2023.01); H01L 21/68 (2006.01); H10K 59/12 (2023.01);
U.S. Cl.
CPC ...
C23C 14/042 (2013.01); H10K 71/191 (2023.02); H01L 21/682 (2013.01); H10K 59/1201 (2023.02);
Abstract
A deposition apparatus includes a mask, a mask frame, a stage disposed on a rear surface of the mask frame, and first to third external force applying parts disposed on the stage. Each of the first portion and the second portion includes a support and a driving part which moves the support. The first to third external force applying parts applies external force to the mask frame to control a shape of the mask frame.