The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Apr. 07, 2026
Filed:
Apr. 24, 2023
Infineon Technologies Ag, Neubiberg, DE;
Hans-Jörg Timme, Ottobrunn, DE;
Stefan Barzen, Munich, DE;
Marc Füldner, Neubiberg, DE;
Stefan Geißler, Regensburg, DE;
Matthias Friedrich Herrmann, Munich, DE;
Maria Kiriak, Munich, DE;
Abidin Güçlü Onaran, Munich, DE;
Konstantin Tkachuk, Unterhaching, DE;
Arnaud Walther, Unterhaching, DE;
Infineon Technologies AG, Neubiberg, DE;
Abstract
A MEMS device includes a first deflectable membrane structure, a rigid electrode structure and a second deflectable membrane structure in a vertically spaced configuration. The rigid electrode structure is arranged between the first and second deflectable membrane structures. The first and second deflectable membrane structures each includes a deflectable portion, and the deflectable portions of the first and second deflectable membrane structures are mechanically coupled by mechanical connection elements to each other and are mechanically decoupled from the rigid electrode structure. At least a subset of the mechanical connection elements are elongated mechanical connection elements. The elongated mechanical connection elements have a lateral cross-sectional area with a laterally elongated dimension along a direction which is within a tolerance range of +/−20° perpendicular to the local membrane deflection gradient of the first and second deflectable membrane structures at the lateral position of the respective elongated mechanical connection element.