The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Apr. 07, 2026
Filed:
Dec. 26, 2019
Nikon Corporation, Tokyo, JP;
Tomoki Miyakawa, Kumagaya, JP;
NIKON CORPORATION, Tokyo, JP;
Abstract
A beam processing apparatus is a beam processing apparatus that irradiates a workpiece with a processing beam, and performs a removal processing of a first part of the workpiece by irradiating a first surface of the workpiece with the processing beam while moving an irradiation position of the processing beam along a first direction, and performs a removal processing of a second part of the workpiece by irradiating a second surface, which is formed at the workpiece by the removal processing of the first part, with the processing beam while moving the irradiation position of the processing beam along the first direction. A moving range of the processing beam for the removal processing of the second part is smaller than a moving range of the processing beam for the removal processing of the first part.