The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Mar. 31, 2026
Filed:
Feb. 16, 2023
Hon Young Semiconductor Corporation, Hsinchu City, TW;
Yan-Ru Chen, Hsinchu City, TW;
Hon Young Semiconductor Corporation, Hsinchu City, TW;
Abstract
Some embodiments of the present disclosure provide a method of forming a semiconductor device including forming a dielectric layer stack on an epitaxial layer. The dielectric layer stack includes at least one first layer and at least one second layer, the at least one first layer is made of a first material, the at least second layer is made of a second material different from the first material. The dielectric layer stack is patterned to form a staircase-shaped dielectric layer stack. An ion implantation process is performed to the epitaxial layer by using the staircase-shaped dielectric layer stack.